• 基于BCD工艺的LDMOS器件栅结构优化研究进展

    Research progress on gate structure optimization of LDMOS devices in BCD process

    • LDMOS(Lateral Double-diffused complementary Metal Oxide Semiconductor)器件具有开关速度快、驱动能力强、输入阻抗高、热稳定性好等特点,主要应用于智能功率集成电路,是BCD工艺中的主流功率器件。目前关于LDMOS器件研究的热点主要集中在对其结构的优化,重点是如何平衡击穿电压和比导通电阻这一对矛盾优化参数。为了平衡这两种参数以获得更高性能的LDMOS器件,提出了各种性能优化方法。在LDMOS器件中引入多栅结构作为一种有效的性能提升方法有着其得天独厚的优势,但相关研究较少。以近年来报道的LDMOS器件各种新结构中的多栅结构优化为主,分析了多栅结构对于LDMOS器件的性能的影响,详细讨论了双栅、平面栅、槽栅、漂移区栅和三栅在改善LDMOS器件性能中所起的作用和效果,最后总结了这些新结构与传统结构的优缺点。

       

      Abstract: Lateral Double-diffused complementary Metal Oxide Semiconductor(LDMOS) devices have the characteristics of extremely high switching speed, strong driving ability, high input impedance, and high thermal stability. LDMOS devices are mainly applied in intelligent power integrated circuits and are also the mainstream power devices in the BCD process. The current research hotpots on LDMOS devices concentrate mainly on the optimization of their structures, especially focusing on how to balance the contradictory optimization parameters of breakdown voltage and specific on resistance. In order to balance these two parameters to obtain LDMOS devices with higher performance, various performance optimization methods have been proposed. Introducing the multi-gate structure into LDMOS devices as an effective performance improvement method has its unique advantages, but there are relatively few related studies. The optimization of multi gate structures in LDMOS devices reported in recent years are mainly focused on, and the influence of multi gate for the performance of LDMOS devices are analyzing. The role and effect of double gate, planner gate, trench gate, drift region gate, and triple gate in the improvement of LDMOS devices are discussed in detail. Finally, the advantages and disadvantages of these optimized structures compared with traditional structures are summarized.

       

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