• 三势垒层增强型AlGaN/GaN MIS-HEMT直流特性仿真研究

    Simulation of DC characteristics of enhancement-mode AlGaN/GaN MIS-HEMT using triple barrier layer

    • GaN基高电子迁移率晶体管(High Electron Mobility Transistor, HEMT)因其在高频、高功率和高温应用中的优异性能而受到广泛关注。金属-绝缘体-半导体高电子迁移率晶体管(Metal-Insulating-Semiconductor High Electron Mobility Transistor, MIS-HEMT)通过引入栅极绝缘层来改善器件的性能,特别是减少栅极泄漏电流和提高击穿电压。然而使用凹栅结构的MIS-HEMT在实现阈值电压(Vth)均匀性上存在挑战。使用Silvaco TCAD软件对具有三重势垒层的凹栅结构增强型AlGaN/GaN MIS-HEMT进行了数值研究,与传统肖特基栅极HEMT相比,三势垒层增强型AlGaN/GaN MIS-HEMT采用压电中和技术(Piezoelectric Neutralization Technology, PNT),实现了高阈值电压均匀性。为了使器件获得更好的直流特性,研究了改变缓冲层和PNT层Al质量分数对器件的影响。此外,还详细分析了器件尺寸缩放(例如栅漏距离Lgd和栅长Lg)对直流特性的依赖性。优化后的MIS-HEMT的Vth为0.8 V,输出电流为0.43 A/mm,饱和漏电流为1.99 A/mm,最大跨导(gmmax)为0.14 S/mm,比导通电阻(Ron,sp)为1.64 mΩ·cm2。研究结果对于三势垒层AlGaN/GaN MIS-HEMT结构的设计或优化具有重要的指导意义。

       

      Abstract: GaN-based high electron mobility transistor (HEMT) has received much attention for its excellent performance in high-frequency, high-power, and high-temperature applications. Metal-insulating-semiconductor high electron mobility transistor(MIS-HEMT) improve device performance by introducing an gate insulating layer, especially reducing gate leakage current and increasing breakdown voltage. However, MIS-HEMT using recessed-gate structure presents challenges in achieving threshold voltage (Vth) uniformity. An enhancement-mode recessed-gate structure AlGaN/GaN MIS-HEMT device with triple barrier layer is numerically investigated using Silvaco TCAD software. Compared to traditional Schottky gate HEMTs, the three barrier layer enhancement-mode AlGaN/GaN MIS-HEMT uses piezoelectric neutralization technology (PNT) to achieve high Vth uniformity. In order to obtain better direct current characteristics of the device, the effect of changing the Al component of buffer layer and PNT layer on the device is studied. In addition, the dependence of device size scaling (such as gate drain distance Lgd and gate length Lg) on direct current characteristics is analyzed in detail. The optimized MIS-HEMT has a Vth of 0.8 V, an output current of 0.43 A/mm, and a saturation leakage current of 1.99 A/mm. The maximum transconductance (gmmax) is 0.14 S/mm, and the specific on-resistance (Ron,sp) is 1.64 mΩ·cm2. The results of this study have important guiding significance for the design and optimization of AlGaN/GaN MIS-HEMT structures with three barrier layers.rier layers.

       

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