• 基于UTB-SOI TFET的ESD防护器件研究

    The research on ESD protection devices based on UTB-SOI TFET

    • 随着集成电路工艺尺寸不断缩小,超薄膜器件对高能量静电放电(Electrostatic Discharge,ESD)冲击的抵抗能力日益下降。为提高其ESD防护性能,本文基于超薄绝缘体上硅(Ultra-Thin Body Silicon-On-Insulator,UTB-SOI)工艺,提出一种具有背栅控制的栅接地隧穿场效应晶体管(Back-Gate Controlled Grounded-Gate Tunneling Field-effect Transistor,BGC-GGTFET)ESD防护器件结构。该结构通过在背栅引入ESD电压控制信号并结合高掺杂N阱区,形成有效的纵向电场调控机制,显著改变了沟道区域的载流子分布,加速了导通电阻的下降,进而促进ESD电流泄放路径的快速建立。TCAD仿真结果表明,与传统结构相比,所提新型器件的开启时间从0.73 ns大幅缩短至0.19 ns,响应速度提升超过3倍;失效电流从1.7 mA提高至1.81 mA,电流泄放能力提升6.5%。仿真结果证实新结构在ESD冲击下具有更优的鲁棒性,为先进UTB-SOI工艺中隧穿场效应晶体管的静电防护设计提供了有效参考。

       

      Abstract: The continuous scaling of integrated circuit technology has rendered ultra-thin film devices increasingly susceptible to high-energy electrostatic discharge (ESD) events. To enhance the ESD protection capability of such devices, this paper proposes a back-gate controlled grounded-gate tunneling field-effect transistor (BGC-GGTFET) ESD protection structure based on ultra-thin body silicon-on-insulator (UTB-SOI) technology. By introducing an ESD voltage control signal to the back-gate and utilizing a heavily doped N-well region, an effective vertical electric field modulation mechanism is established. This mechanism significantly alters the carrier density distribution in the channel, accelerates the reduction of turn-on resistance, and thereby facilitates the rapid formation of an ESD current discharge path. TCAD simulation results show that, compared with a conventional device, the proposed structure reduces the turn-on time from 0.73 ns to 0.19 ns, achieving a response speed improvement of over three times. The failure current increases from 1.7 mA to 1.81 mA, corresponding to a 6.5% enhancement in current discharge capability. These results confirm the superior robustness of the new structure against ESD stress, providing a valuable reference for ESD protection design of tunneling field-effect transistors in advanced UTB-SOI technologies.

       

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