• 3D NAND FLASH存储器辐射效应研究进展及展望

    Radiation effects of 3D NAND FLASH memory: Progress and prospects

    • 相较于传统平面FLASH架构,引入垂直结构的3D NAND FLASH存储器显著提升了存储密度,有效缓解了工艺尺寸持续微缩的物理限制,在航天电子领域展现出广阔应用前景。然而,三维结构也带来了新的空间可靠性问题,使得三维堆叠器件表现出区别于平面器件的辐射响应机制。综述了3D NAND FLASH存储器辐射效应的研究现状,介绍了空间辐射环境下3D NAND FLASH的总剂量效应与单粒子效应(重离子、质子、中子)的研究进展,分析了涉及的辐射损伤机理和性能退化规律。结果表明,三维结构设计在一定程度上提高了器件的抗总剂量效应和单粒子效应能力。重点探讨了三维结构特有的辐射响应现象,包括总剂量辐射响应在垂直堆叠层结构中的“U”型非均匀变化、重离子效应中阈值电压的双次级峰分布等。最后,基于3D NAND FLASH的发展趋势,对先进NAND FLASH(尤其是面向超高堆叠层数和三维封装微模组方向发展的器件)辐射效应未来的研究方向和抗辐射加固思路进行了展望。

       

      Abstract: By introducing a vertical structure, 3D NAND FLASH memory significantly enhances storage density compared to conventional planar FLASH while effectively alleviating the physical constraints imposed by the continuous scaling of process dimensions, which shows its application prospects in aerospace electronic devices. However, the three-dimensional structure also brings new space reliability issues. 3D-stacked devices exhibit radiation response mechanisms distinct from those of planar devices. In this work, the research dynamics and trends of radiation effects in 3D NAND FLASH memory are introduced, and the radiation damage effects of 3D NAND FLASH including Total lonizing Dose effect and Single Event Effects(Heavy ions, protons, neutrons) in the space environment are presented. Involved radiation damage mechanisms and performance degradation laws are analyzed. The research shows that the 3D structural design improves radiation tolerance against both TID and SEE to some extent. Unique radiation response phenomenas inherent to 3D architectures are highlighted, such as the “U”-shaped non-uniform variation of TID response across vertical stacks and the dual secondary peaks in threshold voltage shifts under heavy-ion irradiation. Finally, considering emerging trends in 3D NAND FLASH development, particularly ultra-high stacking layers and 3D-packaged micro-modules, the future research directions and radiation hardening strategies for advanced NAND FLASH technologies are prospected.

       

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